Sensor with micro break compensation

ABSTRACT

A sensor device includes a high voltage circuit, a sensor and a charge storage. The sensor utilizes a low voltage supply. The high voltage circuit includes a blocking device and a regulating device. The blocking device is configured to block negative voltages of the high voltage supply. The regulated device is configured to receive a high voltage supply and generate the low voltage supply from the high voltage supply. The high voltage supply is DC. The charge storage has a vertical capacitor and is configured to maintain the low voltage supply during a power break and to store and maintain charge during non-break periods.

REFERENCE TO RELATED APPLICATION

This application is a continuation of U.S. application Ser. No.14/445,532 filed on Jul. 29, 2014, the contents of which areincorporated by reference in their entirety.

BACKGROUND

Sensors are utilized in sensing systems to detect properties, such aslight, temperature, motion, and the like. The sensors are typicallyconfigured to measure a property and then provide the measurement in asuitable form. For example, a sensor may measure a magnetic field andthen provide the measurement as an output signal. The measurements arethen used to calculate characteristics or results by a controller, suchas an electronic control unit.

Sensors are supplied with power in order to properly operate and provideaccurate measurements. If the supplied power breaks or deviates from asuitable range of voltage and/or current, erroneous measurements, nomeasurements, and the like can result.

Suitable mechanisms to compensate for power breaks and the like and tofacilitate accurate measurements are needed.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagram of a sensor system that compensates for powerbreaks.

FIG. 2 is a graph illustrating power breaks that can occur in sensorsystems.

FIG. 3 is a diagram of a sensor system having a trench capacitor thatcompensates for power breaks.

FIG. 4 is a cross sectional view of a vertical or trench capacitor.

FIG. 5 is a diagram depicting examples of other suitable blockingcomponents that can be used in the above systems.

FIG. 6 is a diagram of a sensor system that compensates for power breaksat high voltage levels.

FIG. 7 is a diagram of a sensor system that compensates for power breaksat high voltage levels using an integrated high voltage charge storagecomponent.

FIG. 8 is a flow diagram illustrating a method of operating a sensordevice.

DETAILED DESCRIPTION

The present invention will now be described with reference to theattached drawing figures, wherein like reference numerals are used torefer to like elements throughout, and wherein the illustratedstructures and devices are not necessarily drawn to scale.

Devices, systems and methods are disclosed that compensate for powerbreaks in supply power to sensors and/or signal processing components. Apower break is an interruption in supply power for a relatively shortperiod of time.

FIG. 1 is a diagram of a sensor system 100 that compensates for powerbreaks. The system 100 is provided in a simplified form in order tofacilitate understanding. The system 100 can be utilized in automotivesystems, vehicle systems, and the like. The system 100 can be fabricatedinto one or more devices.

The system 100 includes high voltage components 102, a charge storagecomponent 104 and sensor and signal processing components 106. The highvoltage components 102 receive a high voltage supply 108 and provide alow voltage supply 110. The high voltage supply 108 is at a relativelyhigh voltage, such as 12 volts, 20 volts and the like. In an automotivesystem, the high voltage supply 108 can be supplied by a battery device.In one example, the high voltage supply 108 is at a voltage of 8 or morevolts. The low voltage supply 110 is provided at a level generally belowthe high voltage supply 108. The low voltage supply 110 is provided at alevel suitable for the sensor and signal processing component 106. Inone example, the low voltage supply 110 is provided at about 3 volts. Inanother example, the low voltage supply 110 is provided at 5 or lessvolts.

The high voltage components 102 include mechanisms to regulate the lowvoltage supply 110 and block reverse voltages from propagating to thehigh voltage supply 108. Typically, the components 102 include a highvoltage reverse blocking component and a regulating device. The blockingcomponent mitigates negative voltages, spikes, and the like fromimpacting the high voltage supply 108. Otherwise, the source of the highvoltage supply 108 and/or other components connected thereto could bedamaged or negatively impacted. In one example, the high voltage reverseblocking component is a PMOS transistor configured for blocking. Inanother example, the high voltage reverse blocking component is ablocking diode.

The regulating device of the components 102 regulates and generates thelow voltage supply 110 according to a regulation input signal 112. Inonce example, the regulating device includes a power NMOS transistor.The regulation input signal 112 controls the level of the low voltagesupply 110. Thus, the regulation input signal 112 can be variedthroughout a range to select an output level for the low voltage supply110 at a select level within a range of values. It is also appreciatedthat other suitable blocking components and regulating devices arecontemplated. Some examples of suitable mechanisms are provided below.

The sensor and signal processing components 106 include one or more ofsensors, control units, processing units, and the like. The components106 require the low voltage supply 110 for proper operation. Powerbreaks, such as micro breaks, can cause the components 106 to fail, beunstable, provide inaccurate information, and the like.

The charge storage component 104 is configured to maintain the lowvoltage supply 110 at a suitable level during power breaks. The chargestorage component 104 stores and maintains charge during non-breakperiods. The component 104 provides at least a portion of its storedcharge during power breaks to compensate for deviations or drops in thelow voltage supply 110. As a result, power breaks that alter the outputof the high voltage components 102 are compensated for by the chargestorage component 104.

The component 104 is configured to store a charge sufficient tocompensate for a break in power for a selected time period. In oneexample, the charge storage component 104 includes one or morecapacitors. The size and configuration of the capacitors are selected tomitigate cost and area consumption. For example, vertical capacitors,such as trench capacitors can be utilized. Vertical capacitors arecapacitors that have electrodes and capacitor dielectric generallyarranged vertically with respect to a horizontal substrate.Additionally, the capacitors can be low voltage capacitors as theyoperate with the low voltage supply 110.

Additionally, the charge storage component 104 is integrated with thehigh voltage components 102 and, optionally, other components into asingle package. In contrast, other approaches require use of a largeexternal capacitor in order to provide charge during breaks in power.

FIG. 2 is a graph 200 illustrating power breaks that can occur in sensorsystems. The graph 200 includes an upper portion depicting the highvoltage supply 108 and a lower portion depicting the low voltage supply110. The graph 200 depicts time on an x-axis and volts on a y-axis.

The high voltage supply 108 is shown as a line in the upper portion. Apower break, which in this example is a micro break, occurs at 202. Avariety of potential events can cause the break, such as power sourcedamage, temporary disconnection, magnetic fields, and the like. Themicro break has a relatively short temporal duration, in the range of1-100 micro seconds. In this example, the micro break 202 results in adrop of the high voltage supply 108. In other breaks, the voltage canturn negative, drop to zero, and the like.

The low voltage supply 110 is shown as a line in the lower portion. Apotential fault 204 is shown at a time that corresponds with the microbreak 202. The fault 204 results in a drop in voltage of the low voltagesupply 110. Components, such as sensors, processing components, and thelike that rely on the low voltage supply 110 can fail due to the fault204.

However, utilizing a charge storage component, such as the component 104described above, mitigates the impact of the fault 204 by providing atleast a portion of its charge during the fault 204 and the micro break202.

FIG. 3 is a diagram of a sensor system 300 having a trench capacitorthat compensates for power breaks. The system 300 can be utilized inautomotive systems, vehicle systems, and the like. Additionally, thesystem 300 can be fabricated into one or more devices. The system 300can be utilized with the system 100 described above. Additionaldescription of like numbered components can be found above in thedescription of system 100.

The system 300 includes high voltage components 102, a charge storagecomponent 104, sensor and signal processing components 106, and highvoltage capacitors 314. The high voltage capacitors 314 filter unwantedsignals/noise from the high voltage supply 108.

The high voltage capacitors 314 are configured or selected toaccommodate a high voltage supply 108. The high voltage capacitorsinclude one or more capacitors. These capacitors can be formed on one ormore dies, including a die on which the charge storage component 104 isformed on. Alternately, the capacitors 314 can be external capacitorsthat are physically separate from components such as the charge storagecomponent 104. Some or all of the capacitors 314 are vertical or trenchcapacitors, whether internal or external. For example, at least some ofthe high voltage capacitors 314 may be arranged external to thecomponent 104 due size and cost constraints. In another example, thehigh voltage capacitors 318 utilize a series of low voltage capacitorsthat can be formed/integrated with other components of the system 300.In one example, a plurality of vertical or trench capacitors areconnected in serial to provide the high voltage filtering for the highvoltage supply 108.

The high voltage supply 108 is at a relatively high voltage, such as 12volts, 20 volts and the like. In an automotive system, the high voltagesupply 108 can be supplied by a battery device. In one example, the highvoltage supply 108 is at a voltage of 8 or more volts.

The high voltage components 102 receive the high voltage supply 108 andprovide a low voltage supply 110. The low voltage supply 110 is providedat a level below the high voltage supply 108. Additionally, the lowvoltage supply 110 is provided at a level suitable for the sensor andsignal processing component 106. In one example, the low voltage supply110 is provided at about 3 volts. In another example, the low voltagesupply 110 is provided at 5 or less volts.

The high voltage components 102 include mechanisms to regulate the lowvoltage supply 110 and block reverse voltages and the like frompropagating to the high voltage supply 108. A blocking component 316 iscoupled to the high voltage supply 108 and mitigates negative voltages,spikes, and the like from impacting the high voltage supply 108.Otherwise, the source of the high voltage supply 108 and/or othercomponents connected thereto could be damaged or negatively impacted. Inone example, the blocking component 316 is a PMOS transistor configuredfor blocking. In another example, the blocking component 316 is ablocking diode.

A power amplifier regulating device 318 is coupled to the blockingcomponent 316 and the low voltage supply 110. The regulating device 318generates the low voltage supply 110 according to a regulation inputsignal 112. In once example, the regulating device includes a power NMOStransistor. The regulation input signal 112 controls the level of thelow voltage supply 110. Thus, the regulation input signal 112 is variedthroughout a range to select an output level for the low voltage supply110 at a select level within a range of values.

The sensor and signal processing components 106 include one or more ofsensors, control units, processing units, and the like. The components106 require the low voltage supply 110 for proper operation. Powerbreaks, such as micro breaks, can cause the components 106 to fail, beunstable, provide inaccurate information, and the like.

The charge storage component 104 is a trench capacitor in this example.The trench capacitor is a vertical capacitor. A cross sectional view ofthe component 104 is provided for illustrative purposes.

The trench capacitor 104 is configured to maintain the low voltagesupply 110 at a suitable level during power breaks. During non-breakperiods, the capacitor 104 stores and maintains charge. During powerbreaks, the capacitor 104 provides at least a portion of its storedcharge to compensate for deviations or drops in the low voltage supply110. As a result, power breaks that alter the output of the high voltagecomponents 102 are compensated for by the trench capacitor 104.

The trench capacitor 104 is compatible with low voltages and consumes arelatively small amount of area. As a result, the trench capacitor 104can be provided with other the high voltage components 102 and,optionally, other components into a single package. In contrast, otherapproaches require use of a large external capacitor in order to providecharge during breaks in power.

FIG. 4 is a cross sectional view of a vertical or trench capacitor 104.The capacitor 104 serves as a charge storage component. The capacitor104 is provided in a cross sectional view for illustrative purposes. Itis appreciated that the dimensions and size ratios presented in FIG. 4are for illustrative purposes only.

The capacitor 104 includes a substrate 416 comprised of a suitablesemiconductor material, such as silicon. A trench is formed in thesemiconductor material. A first vertical electrode 418 is formed withinthe trench of the substrate 416. The first electrode 418 issubstantially vertical in its orientation. A capacitor dielectric layer428 is formed on/over the first electrode 418. The layer 418 is alsoformed to be substantially vertical in its orientation. A secondelectrode 422 is formed in the dielectric layer 420. An upper layer 424is formed over the other layers and serves to protect the underlyinglayers. The upper layer 424 includes and provides interconnects to thefirst electrode 418 and the second electrode 422.

It is appreciated that variations of the capacitor 104 are contemplatedand that other capacitors and/or vertical capacitors can be utilizedwith the above systems and variations thereof.

FIG. 5 is a diagram depicting examples of other suitable blockingcomponents that can be used in the above systems. A Schottky diode 528can be used in one example. An anti-serial HVnMOS or HV-DMOS device 526can also be used in another example. It is appreciated that othersuitable blocking components can be used as well.

FIG. 6 is a diagram of a sensor system 600 that compensates for powerbreaks at high voltage levels. The system 600 is provided in asimplified form in order to facilitate understanding. The system 600 canbe utilized in automotive systems, vehicle systems, and the like. Thesystem 600 can be fabricated into one or more devices.

The system 600 includes high voltage components 102, a low voltagecharge storage component 104, sensor and signal processing components106, and a high voltage charge storage component 604. The system 600 isformed within a package or device 610, except the high voltage chargestorage component 604 is external to the package 610.

The high voltage components 102 receive a high voltage supply 108 andprovide a low voltage supply 110. The low voltage supply 110 is providedat a level suitable for the sensor and signal processing component 106.In one example, the low voltage supply 110 is provided at about 3 volts.In another example, the low voltage supply 110 is provided at 5 or lessvolts.

The high voltage components 102 include a reverse protection device thatoperates according to an under voltage signal 602. If the signal 602indicates an under voltage condition, the reverse protection devicesdisconnects from the high voltage supply 108. There is also a resistor Rconnecting the reverse protection device to the high voltage supply 108,in this example.

The high voltage components 102 also include a regulation device thatgenerates the low voltage supply 110. The regulation device receives aregulation control signal to select a low voltage level for the supply110.

The high voltage components 102 are coupled to the high voltage chargestorage component 604. The high voltage charge storage component 604supplies mitigate power breaks and can provide at least a portion of itsstored charge to the regulation device during a power break. The highvoltage charge storage component 604 operates with higher voltages thanthe low voltage charge storage component 104. The high voltage chargestorage component 604, in one example, uses one or more verticalcapacitors, such as trench capacitors, to operate with the high voltageand maintain, store and supply charge for power breaks.

In one example, transistor drains of the reverse protection device andthe regulation device are connected to the high voltage charge storagecomponent 604. Additionally, an electrostatic discharge (ESD) protectiondevice 606 can also be coupled to the high voltage components 102.

The low voltage charge storage component 104 is coupled to and the lowvoltage supply 110. As described above with regards to the chargecomponent 104 of FIG. 1, the low voltage charge storage component 104maintains, stores, and provides charge for power breaks, including microbreaks. It is appreciated that the low voltage charge storage component104 can be omitted from the system 600.

The sensor and signal processing components 106, similar to thosedescribed above, include one or more of sensors, control units,processing units, and the like. The components 106 require the lowvoltage supply 110 for proper operation. Power breaks, such as microbreaks, can cause the components 106 to fail, be unstable, provideinaccurate information, and the like.

FIG. 7 is a diagram of a sensor system 700 that compensates for powerbreaks at high voltage levels using an integrated high voltage chargestorage component. The system 700 is similar to the system 600 describedabove and its description can be referenced for additional details.

Instead of an external high voltage charge storage component 604, thesystem 700 uses an integrated high voltage charge storage component 704within a package or device 712.

The high voltage charge storage component 704 includes one or morevertical capacitors. Typically, there are a plurality of capacitorsthat, collectively, operate with the high voltage levels.

It is appreciated that the high voltage storage components 604 and 704,and variations thereof can be integrated with the systems 100 and 300described above.

FIG. 8 is a flow diagram illustrating a method 800 of operating a sensordevice. The method 800 utilizes a charge storage component to supplementa low voltage supply during power breaks. The method 800 can be used inconjunction with the above systems and variations thereof.

The method 800 begins at block 802, where a charge storage component isconfigured. The component is configured to have a selected chargestoring capability and low voltage operation. The charge storingcapability is selected to be sufficient to provide or supplement a lowpower supply for typical or expected power break durations. In someexamples, the charge storage is selected to provide power for powerbreak durations of 20 micro seconds.

The charge storage component is comprised of at least one verticalcapacitor, such as a trench capacitor. Further, the component caninclude a plurality of vertical capacitors and/or a single verticalcapacitor. In one example, the at least one capacitor is a trenchcapacitor having vertical electrodes and a vertical capacitordielectric.

Charge is stored within the charge storage component during normaloperation at block 804. Charge is provided to the component from a lowvoltage supply and/or a high voltage supply during normal operation ornon power-break periods. Sufficient charge is stored to supplement orprovide sufficient power as needed.

The low voltage supply is generated from a high level supply by aregulating device at block 806. A control signal can be used to selector adjust the low voltage supply. The high level supply is at a highervoltage level than the low voltage supply. In one example, the highlevel supply is above about 10 volts and the low level supply is belowabout 5 volts.

The low voltage supply is supplemented by the charge storage componentupon a power break at block 808. Stored charge from the charge storagecomponent is used to supplement or buffer the low voltage supply. Thesupply is brought to at least a threshold value/voltage that permitsoperation of components, such as sensor elements and processingcomponents. The stored charge is typically sufficient for the temporalduration of the power break.

In one variation, the high voltage supply is supplemented by a highvoltage charge storage component upon a power break. The high voltagecharge storage component is configured to operate at a high voltage andto have sufficient charge storage capability. In one example, the highvoltage charge storage component includes a plurality of capacitors,including vertical capacitors, which individually may not be highvoltage capable.

In another variation, the high voltage supply is filtered using one ormore high voltage capacitors. These capacitors filter the high voltagesupply to remove unwanted noise and components. The capacitors caninclude one or more of low voltage capacitors and high voltagecapacitors. Additionally, some or all of the capacitors can be formed ona die with the charge storage component. Further, some or all of thecapacitors can be formed external to the charge storage component and/orthe low voltage supply generating regulating device. Typically, the highvoltage capacitors include vertical capacitors, such as trenchcapacitors.

As described above, the power break is a temporary reduction or loss ofpower provided. In one example, the power break is a micro break andoccurs for a short period of time, such as 20 micro seconds or less.

While the method and variations thereof are illustrated and describedbelow as a series of acts or events, it will be appreciated that theillustrated ordering of such acts or events are not to be interpreted ina limiting sense. For example, some acts may occur in different ordersand/or concurrently with other acts or events apart from thoseillustrated and/or described herein. In addition, not all illustratedacts may be required to implement one or more aspects or embodiments ofthe disclosure herein. Also, one or more of the acts depicted herein maybe carried out in one or more separate acts and/or phases.

It is appreciated that the claimed subject matter may be implemented asa method, apparatus, or article of manufacture using standardprogramming and/or engineering techniques to produce software, firmware,hardware, or any combination thereof to control a computer to implementthe disclosed subject matter (e.g., the systems/devices shown in FIGS.1, 2, etc., are non-limiting examples of system that may be used toimplement the above methods). The term “article of manufacture” as usedherein is intended to encompass a computer program accessible from anycomputer-readable device, carrier, or media. Of course, those skilled inthe art will recognize many modifications may be made to thisconfiguration without departing from the scope or spirit of the claimedsubject matter.

A sensor device includes a high voltage component, a sensor componentand a charge storage component. The sensor component utilizes a lowvoltage supply. The high voltage component is configured to generate thelow voltage supply from a high voltage supply. The charge storagecomponent is configured to provide charge for the low voltage supplyduring a power break. The charge storage component has a verticalcapacitor.

In one example, the vertical capacitor is a trench capacitor formed in ahorizontal substrate and having electrodes generally vertical. Inanother example, the vertical capacitor operates at low voltages of lessthan 5 volts. In yet another example, the charge storage component andthe high voltage component are formed within a package. In anotherexample, another sensor is configured to use the low voltage supply foroperation.

A sensor device includes a high voltage reverse protection component, aregulating device, a high voltage charge storage component, and a sensorcomponent. The high voltage reverse protection component is coupled to ahigh voltage supply and configured to isolate the high voltage supplyupon an under voltage condition. The regulating device is coupled to thehigh voltage reverse protection component and configured to generate alow voltage supply from the high voltage supply. The high voltage chargestorage component is coupled to the high voltage reverse protectioncomponent. The high voltage charge storage component is configured toprovide a high voltage charge to the regulating device upon a powerbreak. The sensor component is configured to operate using the lowvoltage supply during the power break.

A method of operating a sensor device is disclosed. A charge storagecomponent is configured to have a selected charge storing capability andto operate at a low voltage. The charge storage component includes avertical capacitor. Charge is stored in the charge storage componentduring normal operation. A low level supply is generated from a highlevel supply by a regulating device. The low level supply issupplemented by the charge storage component upon a power break.

In particular regard to the various functions performed by the abovedescribed components or structures (assemblies, devices, circuits,systems, etc.), the terms (including a reference to a “means”) used todescribe such components are intended to correspond, unless otherwiseindicated, to any component or structure which performs the specifiedfunction of the described component (e.g., that is functionallyequivalent), even though not structurally equivalent to the disclosedstructure which performs the function in the herein illustratedexemplary implementations of the invention. In addition, while aparticular feature of the invention may have been disclosed with respectto only one of several implementations, such feature may be combinedwith one or more other features of the other implementations as may bedesired and advantageous for any given or particular application.Furthermore, to the extent that the terms “including”, “includes”,“having”, “has”, “with”, or variants thereof are used in either thedetailed description and the claims, such terms are intended to beinclusive in a manner similar to the term “comprising”.

What is claimed is:
 1. A sensor device comprising: a sensor configuredto utilize a low voltage supply; a high voltage circuit comprising ablocking device and a regulating device, wherein the blocking device isconfigured to block negative voltages of the high voltage supply and theregulating device is configured to receive a high voltage supply andgenerate the low voltage supply from the high voltage supply, whereinthe high voltage supply is DC; and a charge storage having a verticalcapacitor and configured to maintain the low voltage supply during apower break and to store and maintain charge during non-break periods.2. The device of claim 1, wherein the vertical capacitor includes atrench capacitor formed in a semiconductor substrate.
 3. The device ofclaim 1, wherein the vertical capacitor is a low voltage capacitor andoperates at voltages of less than 5 volts.
 4. The device of claim 1,wherein the charge storage and the high voltage component are within asingle package.
 5. The device of claim 1, wherein the sensor is amagnetic sensor.
 6. The device of claim 1, wherein the high voltagesupply is above 10 volts and the low voltage supply is below 5 volts. 7.The device of claim 1, further comprising a high voltage charge storageconfigured to provide a high voltage charge to the high voltage circuitduring the power break.
 8. The device of claim 1, further comprising ahigh voltage filter configured to filter the high voltage supply,wherein he high voltage filter comprises a plurality of low voltagevertical capacitors connected in series.
 9. The device of claim 1,further comprising a high voltage filter configured to filter the highvoltage supply, wherein the high voltage filter comprises a plurality ofexternal vertical capacitors connected in series and located external tothe high voltage circuit.
 10. The sensor device of claim 1, wherein thehigh voltage supply becomes negative during the power break and theblocking device is configured to block the negative voltages during thepower break.
 11. The sensor device of claim 1, wherein the regulatingdevice is configured to regulate the low voltage supply at a selectedlevel within a range of values.
 12. The sensor device of claim 1,wherein the power break is a micro break and has a duration of less thanabout 100 micro seconds.
 13. The sensor device of claim 1, wherein theregulating device is configured to receive a regulation input signal andcontrol a voltage level of the low voltage supply based on the receivedregulation input signal.
 14. A sensor device comprising: a first sensorconfigured to utilize a low voltage supply; a second sensor configuredto utilize the low voltage supply; a high voltage circuit comprising ablocking device and a regulating device, wherein the blocking device isconfigured to block negative voltages of the high voltage supply and theregulating device configured to receive a high voltage supply, generatethe low voltage supply from the a high voltage supply and provide thelow voltage supply to the first sensor and the second sensor, whereinthe high voltage supply is DC; and a charge storage having a verticalcapacitor and configured to maintain the low voltage supply during apower break and to store and maintain charge during non-break periods.15. The device of claim 14, wherein the second sensor comprises signalprocessing circuitry configured to operate using the low voltage supply.16. The device of claim 14, further comprising a high voltage chargestorage configured to provide a high voltage charge to the high voltagecircuit during the power break.
 17. The device of claim 16, furthercomprising a high voltage filter configured to filter the high voltagesupply, wherein he high voltage filter comprises a plurality of lowvoltage vertical capacitors connected in series.
 18. A method ofoperating a sensor device, the method comprising: configuring a chargestorage component to have a selected charge storing capability for amicro break duration and operate at a low voltage, wherein the chargestorage component includes a vertical capacitor; storing charge in thecharge storage component during normal operation; generating a low levelDC supply from a high level supply by a regulating device, wherein thehigh level supply is DC; and supplementing the low level supply by thecharge storage component upon a power break for the micro breakduration.
 19. The method of claim 18, further comprising obtainingsensor measurements using the low level supply.
 20. The method of claim18, further comprising forming the vertical capacitor by: forming atrench in a semiconductor material, forming a first vertical electrodein the trench; forming a capacitor dielectric material within the firstelectrode; and forming a second vertical electrode within the capacitordielectric material.